Semiconductor & Thin Film
Accurate monitoring of process parameters saves time and money in these application sectors. By tracking gas parameters across the entire vacuum process, the ReacTorr-S from ESS eradicates, eliminates and prevents problems caused by parameters such as poor gas feedstock, vacuum problems and process impurities and improves the product in terms of both yield and quality. The return on investment (ROI) for these systems is incredibly short, often as little as one week, and with its ultra-low footprint, these systems also save cost by space saving in expensive clean room environments.
The ReacTorr-STM from ESS is a compact Mass Spectrometer System, combining the very latest in Mass Spectrometry and vacuum technology to bring a dedicated system for Semiconductor processes